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Vacuum locks |
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| To prevent mixing of different atmospheres that may have a impact on processes. | |
| For
transporting workpieces between … |
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different atmosphere (e.g.: air/inert gas) |
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different levels of air purity (clean room technology) |
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different production stages (processing/assembly) |
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For
systems individually adapted to the process and workpieces. |
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Integration of various different transport systems. |
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Integration of a wide variety of measuring systems (temperature, etc.). |
| Design possibilities in any imaginable shape and chamber size (incl. according to customer’s drawings). | |
| Individual concepts of aggregates (heating/pump set, etc.) adapted to the respective process. | |